MSE 5411

MSE 5411

Course information provided by the 2018-2019 Catalog.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.


Prerequisites/Corequisites Prerequisite or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalent.

When Offered Spring.

View Enrollment Information

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361

  • 1 Credit Graded

  • 12497 MSE 5411   LAB 401

    • T
    • Xing, H

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361

  • 1 Credit Graded

  • 12498 MSE 5411   LAB 402

    • W
    • Xing, H

  • Instruction Mode: In Person