MSE 5411

MSE 5411

Course information provided by the 2025-2026 Catalog.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.


Prerequisites REF-FA25/Corequisites REF-FA25 Prerequisite or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalents. Corequisites: None.

Last 4 terms offered (None)

View Enrollment Information

Syllabi: none
  •   Regular Academic Session. 

  • 1 Credit Graded

  • 19457 MSE 5411   LAB 401

    • M
    • Aug 25 - Dec 8, 2025
    • Cha, J

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session. 

  • 1 Credit Graded

  • 19458 MSE 5411   LAB 402

    • T
    • Aug 25 - Dec 8, 2025
    • Cha, J

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session. 

  • 1 Credit Graded

  • 19459 MSE 5411   LAB 403

    • W
    • Aug 25 - Dec 8, 2025
    • Cha, J

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session. 

  • 1 Credit Graded

  • 19460 MSE 5411   LAB 404

    • R
    • Aug 25 - Dec 8, 2025
    • Cha, J

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session. 

  • 1 Credit Graded

  • 19461 MSE 5411   LAB 405

    • F
    • Aug 25 - Dec 8, 2025
    • Cha, J

  • Instruction Mode: In Person