ECE 4360

Last Updated

  • Schedule of Classes - June 11, 2025 2:48PM EDT

ECE 4360
Nanofabrication and Characterization of Electronics

Course information provided by the 2025-2026 Catalog.

This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.


Last 3 terms offered 2024FA, 2023FA, 2022FA

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Syllabi: none

  •   Regular Academic Session.  Combined with: MSE 5410

  • 3 Credits Graded

  • 20215 ECE 4360   LEC 001

  •  
    • TR
    • Aug 25 - Dec 8, 2025

    • Cha, J

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes. This can also be completed virtually prior to participating in the first Lab Module in the 2nd week.